Publication:
Adhesion strength and nanomechanical characterization of ZnO thin films

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cris.author.scopus-author-id57208482927
cris.author.scopus-author-id10046255200
cris.author.scopus-author-id6602183770
cris.virtual.author-orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.author-orcid0000-0002-3634-9306
cris.virtual.author-orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.departmentIndian Institute of Technology, Madras
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.author-orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.author-orcid72761072-2418-40c4-b4ae-cf64273ddd60
cris.virtualsource.author-orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department72761072-2418-40c4-b4ae-cf64273ddd60
cris.virtualsource.department#PLACEHOLDER_PARENT_METADATA_VALUE#
dc.contributor.authorBhardwaj, Vipul
dc.contributor.authorChowdhury, Rajib
dc.contributor.authorJayaganthan R
dc.date.accessioned2023-09-20T04:57:58Z
dc.date.available2023-09-20T04:57:58Z
dc.date.issued28-04-2017
dc.description.abstractThe present study was focused to investigate mechanical properties of ZnO thin films deposited on fused quartz substrates at different sputtering deposition pressures (5, 10, 15, and 20 mTorr) using DC sputtering. The crystallinity and microstructure show a marked influence on the mechanical properties of ZnO thin films. The structural evolution of the thin films is in (002) plane and influenced by deposition pressure. The intensity of (002) peak of the films rises initially and decreases with further increasing deposition pressure. The mechanical properties such as hardness, Young's modulus, and coefficient of friction of ZnO thin films were measured using three-sided pyramidal Berkovich nanoindentation. The adhesion strength of thin films was measured by using scratch test under ramp loading. Load-displacement profile of thin films at continuous indentation cycle without any discontinuity revealed no fracture, cracking event, and defects, which is a consequence of dense microstructure and good adherence of films to the substrate.
dc.identifier.doi10.1557/jmr.2017.85
dc.identifier.issn8842914
dc.identifier.scopus2-s2.0-85017597927
dc.identifier.urihttps://apicris.irins.org/handle/IITM2023/34591
dc.relation.ispartofseriesJournal of Materials Research
dc.sourceJournal of Materials Research
dc.subjectadhesive strength
dc.subjectmicrostructure
dc.subjectnanoindentation
dc.subjectthin films
dc.titleAdhesion strength and nanomechanical characterization of ZnO thin films
dc.typeJournal
dspace.entity.typePublication
oaire.citation.endPage1443
oaire.citation.issue8
oaire.citation.startPage1432
oaire.citation.volume32
oairecerif.author.affiliation#PLACEHOLDER_PARENT_METADATA_VALUE#
oairecerif.author.affiliation#PLACEHOLDER_PARENT_METADATA_VALUE#
oairecerif.author.affiliationIndian Institute of Technology, Madras
person.affiliation.cityRoorkee
person.affiliation.cityChennai
person.affiliation.id60031818
person.affiliation.id60025757
person.affiliation.nameIndian Institute of Technology Roorkee
person.affiliation.nameIndian Institute of Technology Madras
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