Publication: Monolithic Flexural Micropositioners - Linear Stages
Date
01-05-1999
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Abstract
Detailed analysis of revolute pairs with single axis, single notch and intermediate shape has been carried out with FEM package. Based on this analysis, the design of monolithic linear stages making use of single axis/single notch revolute pairs have been analyzed. Finally, the design of two axes monolithic stages with single axis and single notch revolute pair structures have been reported.
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Keywords
Flexural hinges, Micropositioner, Shape function