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Microscopic TV shearography for characterization of microsystems
Date Issued
15-05-2009
Author(s)
Kumar, U. Paul
Kothiyal, M. P.
Mohan, N. Krishna
Abstract
We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented. © 2009 Optical Society of America.
Volume
34