Measurement of static and vibrating microsystems using microscopicTV holography

This paper describes a microscopic TV holographic arrangement to study the static and vibrating microsystems. In the optical setup, the object beam and the reference beam arms are provided with a phase shifting mirror and a bias phase modulation mirror to carry out the measurement of the out-of-plane deformation and the vibration amplitude fields, respectively. A long working distance microscope is used in the setup for magnifying and imaging the objects on to the CCD camera. For static fringe analysis, the system is used in double exposure subtraction mode of operation, while for vibration fringe analysis, it is used in the time average contrast reversal refreshing mode of operation. An improved approach for qualitative analysis of time averaged fringes helps in reducing the number of frames required for analysis. The usefulness of the system is demonstrated by examples of static and vibration measurements for different microobjects. © 2010 Elsevier GmbH.