Effect of process parameters on heat affected zone in micro machining of borosilicate glass using μ-ECDM process

Application of borosilicate glass in Micro Electro Mechanical Systems (MEMS) devices are increasing due to many of its intrigue properties. Micro machining of glass for such applications needs hybrid technology so as to produce precise products. Electro Chemical Discharge Machining (ECDM) has showed immense scope in micro machining of glass. Present paper focuses on the effect of different process parameters of μ-ECDM on Heat Affected Zone (HAZ) while machining borosilicate glass. Grey Relation Analysis (GRA) is used to optimize the process variables. The optimized process variables are confirmed with experimental results. © (2014) Trans Tech Publications, Switzerland.