Microscopic TV holography and interferometry for surface profiling and vibration amplitude measurement in microsystems

The micro-electro-mechanical systems (MEMS) technology requires a robust non-contact quantitative measurement system for the characterisation of their performance, reliability and integrity. A TV holographic system with long working distance microscope is developed for the static, dynamic and 3-D surface profile characterisation of microsystems. The system can be operated either in continuous or stroboscopic illumination mode of operation. The usefulness of the system for measurement of deflection, discontinuities, resonance mode shapes and vibration amplitudes on both smooth and rough micro samples is discussed and demonstrated. © 2011, DESIDOC.