Design and development of a piezoelectrically actuated micropump for drug delivery application

Micropumps form the heart of several microfluidic systems like micro total analysis system (µTAS) and drug delivery devices, which have resulted from the advancement of silicon micromachining technology. Among the different available types of micropumps, valveless micropumps are better suited for biological applications as they do not have flow-rectifying valves and are less prone to clogging and wear. However, their main drawback is low thermodynamic efficiency. This can be improved if we have a better understanding of the effects of geometry on the performance. This forms one of the objectives of this work. This chapter describes the activity on the design and development of valveless micropumps. A numerical parametric study of the performance of valveless micropumps has been carried out and is presented to bring out the effects of different geometrical parameters. Based on these design approaches, silicon-based micropumps are fabricated and characterized. The performance of one of these micropumps is compared with designed value in this work.