Extracting the FEOL and BEOL components of thermal resistance in SiGe HBTs

An efficient technique to extract the front-end-of-line and back-end-of-line components of the thermal resistance in bipolar transistors is proposed. The proposed approach is tested with the numerical simulations of silicon germanium HBTs corresponding to the STMicroelectronics B9MW process. We also predict the overestimate in the conventional thermal resistance models which neglects the thermal resistance contribution from the back-end-of-line. The results of the proposed extraction technique are observed to be in agreement with the numerical simulations for different emitter geometries.