A Quasi-Static Model for the Coupling Impedance between Coplanar Rectangular Contacts on a Bulk Substrate

We present a compact model for the quasi-static coupling impedance between two coplanar rectangular contacts, which are misaligned and non-identical, on a bulk substrate. The coupling resistance is modeled as weighted arithmetic mean of the resistances of four aligned identical contact geometries for which a model is available in literature. Our model is scalable with contact dimensions and separation and has been validated against TCAD simulations.