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Self-cleaning femtosecond laser micromachining of Grooves on Silicon: Effect of methanol immersion
Date Issued
20-06-2018
Author(s)
Abstract
In micromachining, the extruded material is re-deposited back on the structured surface. In this work, we report on the advantages and results of fs laser-based surface micromachining of methanol immersed of Si comparing the same with the ambient air.