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  1. Home
  2. Indian Institute of Technology Madras
  3. Publication5
  4. Self-cleaning femtosecond laser micromachining of Grooves on Silicon: Effect of methanol immersion
 
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Self-cleaning femtosecond laser micromachining of Grooves on Silicon: Effect of methanol immersion

Date Issued
20-06-2018
Author(s)
Manobalasankar, M.
Sahoo, Anubhab
Krishnan, Sivarama 
Indian Institute of Technology, Madras
DOI
10.1109/ICPCSI.2017.8392096
Abstract
In micromachining, the extruded material is re-deposited back on the structured surface. In this work, we report on the advantages and results of fs laser-based surface micromachining of methanol immersed of Si comparing the same with the ambient air.
Subjects
  • debris removal

  • femtosecond laser

  • micromachining

  • silicon

  • solvent(methanol)

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