Doubly-supported beam actuators for MEMS-based tunable Fabry-Perot etalons

Through development of analytic formulae and finite element modeling, a MEMS-based Fabry-Perot etalon that uses doubly-supported beams for actuation is shown to have a wider tuning range than conventional designs using parallel plate actuators. The boundary conditions of the doubly-supported beam are shown to have a significant effect on the tuning characteristics, and a simple method of controlling the tuning range using the boundary conditions without the need for precise control over material stress is presented. © 2006 IEEE.