Speckle techniques for optical metrology

The self-interference of a large number of random coherent waves scattered from adiffuse object surface or propagated through a medium of random refractive index fluctuationsresults in a granular structure known as speckle pattern. This chapter illustrates a concisedevelopment on various speckle techniques with latest developments and refinements in termsof optical systems, fast and reliable image processing systems and modern fringe analysismethods for optical metrology. Particular emphasis is provided for the measurement ofmechanical behavior of MEMS structures and non-destructive evaluation. © 2007 by Nova Science Publishers, Inc. All rights reserved.