Investigation on laser cleaning of thin films deposited on sapphire

Date Issued
10-12-2009
Author(s)
Palani, I. A.
Kumeda, A.
Matsumoto, T.
Higashihata, M.
Okada, T.
DOI
Abstract
The selective and large area laser cleaning of thin films deposited on sapphire substarte was experimentally investigated. The parameters are optimized for efficient cleaning and the samples were analyzed through SEM and AFM. © 2009 IEEE.
Subjects