Monolithic flexural micropositioners - Angular stages

This paper discusses mutually orthogonal revolute pairs in tandem (MORPT) angular stage and mutually orthogonal and coincident revolute pair (MOCRP) angular stage for two axes deflection of ≈ 1° (0.01745 rad). Theoretical analysis has been compared with the results of finite element method (FEM) analysis. Based on this analysis,single notch revolute pair has been selected for MORPT angular stage and single axis revolute pair has been selected for MOCRP angular stage for fabrication. The deflection of prototypes was measured with a Twyman and Green Interferometer set-up. The loading is done with piezo-actuator providing a resolution of 10-6 rad for the range of 1° deflection.