Fabrication of multilevel spiral phase plates by focused ion beam milling

Date Issued
15-08-2013
Author(s)
Pramitha, V.
Vijayakumar, A.
Indian Institute of Technology, Madras
DOI
Abstract
A focused Ga+ ion beam is used to mill a multilevel spiral phase plate at an acceleration voltage of 30 kV. Circular spiral phase plate with eight levels is fabricated directly on an indium-tin-oxide coated glass plate. Scanning electron microscopy images demonstrate the realization of multilevel phase plate on glass plate using focused ion beam milling. © 2013 SPIE.
Volume
8769
Subjects