Piezoelectric microvalve

A normally closed microvalve is a very important component of a microfluidic system. The fabrication of an active, normally-closed piezoelectric micro valve useful for automated drug delivery or control of fluids in microreactor systems has been studied. The microvalve has dimensions of 19 mm × 19 mm × 7 mm, an inlet diameter of 200 μm, a dead volume of 0.33 μl and has a steady-state flow-rate of about 240 seem.