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Design of a Piezoresistive MEMS Resonator Operating Beyond 1 GHz
Date Issued
2014
Author(s)
Pasula, VV
Nair, DR
DasGupta, A
Abstract
This paper focuses on design of Piezoresistive MEMS resonator for operation beyond 1 GlIz, using FEM simulations. A method for simulation of transconductance of HEMS resonator is presented for first time. Lateral bulk acoustic mode of Twin beam resonator is simulated using the proposed method to get transconductance-frequency plot. Dimensions of the structure are optimized for best operation near 1.3 GHz. Design aspects of resonator including biasing effects, damping effects and anchoring variations are studied.