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Tunable MEMS diffraction gratings
Date Issued
01-01-2012
Author(s)
Gowri Suresh, V.
Indian Institute of Technology, Madras
Indian Institute of Technology, Madras
Abstract
Tunable gratings find applications in spectrometers, tunable cavity lasers and projection displays. In this paper, we discuss the design, modeling, fabrication process and optical characterization of a reflective type period tunable MEMS diffraction grating. The optical modeling of different grating periods for optimum efficiency is presented. A new fixed-fixed beam design with a uniform displacement over 33% of its length is proposed and simulated. The grating membranes are fabricated with gold metal. The optical characterization of the fabricated structure is presented. © 2012 SPIE.
Volume
8549
Subjects