MEMS composite porous silicon/polysilicon cantilever sensor for enhanced triglycerides biosensing

A novel composite porous silicon/polysilicon microcantilever for biosensing applications with enhanced sensitivity is reported. It is fabricated by surface mi cromachining of polysilicon cantilevers followed by the formation of the surface porous layer after release by Reaction Induced Vapor Phase Stain Etch. The microcantilevers with porous surface layer are characterized by their morphology that exhibits a dual macro and nanostructure for very effective immobilization of biomolecules. The current work focuses on the fabrication of composite porous silicon/polysilicon microcantilevers, characterization of their morphology and demonstration of improved immobilization of enzymes resulting in enhanced sensing of triglycerides. © 2008 IEEE.