Electrical and optical properties of pyrolytically sprayed SnO<inf>2</inf> film-Dependence on substrate temperature and substrate-nozzle distance

The dependence of electrical and optical properties of SnO2 films, prepared using the spray pyrolysis technique, on the substrate temperature and substrate-nozzle distance was studied. A 0.05 cm diameter spray nozzle was employed ( 1 4 JAU, Spraying Systems Inc., U.S.A.). Films of about 10-3 Ω cm resistivity and high visible transparency of about 90% were obtained at a substrate temperature of 400°C and a substrate-nozzle distance of 30 cm. It has been observed that substrate-nozzle distance plays an important role in the reaction kinetics of SnO2 films. At a substrate-nozzle distance greater than 30 cm, the homogeneous reaction enhances and hence impedes the growth rate, resulting in inferior electrical and optical properties of the films. © 1990.