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Indian Institute of Technology Madras
Publication14
A STUDY OF THE INFLUENCE OF THE DEPOSITION PARAMETERS ON THE DEFECT DENSITY OF THIN-FILMS
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A STUDY OF THE INFLUENCE OF THE DEPOSITION PARAMETERS ON THE DEFECT DENSITY OF THIN-FILMS
Date Issued
1984
Author(s)
DAS, VD
DOI
10.1016/0040-6090(84)90408-5
Volume
116